Liquid jet head, method of manufacturing liquid jet head, and liquid jet apparatus

摘要

A liquid jet head includes an actuator substrate having a principal surface on which ejection channels and non-ejection channels are formed, common electrodes formed on side surfaces of the ejection channels, individual electrodes formed on side surfaces of the non-ejection channels, individual electrode pads for connection to the individual electrodes, and common electrode pads for connection to the common electrodes. A groove is formed on the principal surface of the actuator substrate for isolating the individual electrode pads and the common electrode pads from one another. An external substrate has individual electrode terminals and common electrode terminals for connection to the individual electrode pads and common electrode pads, respectively. A connection wiring that connects the common electrode terminals to each other is formed along the groove to prevent an electrical short circuit between the connection wiring and the individual electrodes.

主权项

1. A liquid jet head comprising:
an actuator substrate including a plurality of ejection channels communicating with nozzle holes configured to eject liquid from the ejection channels and a plurality of non-ejection channels configured to be incapable of ejecting the liquid from the non-ejection channels, the ejection channels and the non-ejection channels being opened at least on a first principal face of the actuator substrate and arrayed in a width direction perpendicular to a longitudinal direction of the ejection channels and the non-ejection channels on the first principal face; a plurality of common electrodes formed on side faces of the ejection channels; and a plurality of individual electrodes formed on side faces of the non-ejection channels, the actuator substrate further including: a plurality of individual electrode pads configured to be connected to the individual electrodes, the individual electrode pads being formed on the first principal face of the actuator substrate at positions located on an end on a first side of the actuator substrate; a plurality of common electrode pads configured to be connected to the common electrodes, the common electrode pads being formed on the first principal face of the actuator substrate at positions located on a second side of the actuator substrate with respect to the individual electrode pads opposite the first side, a groove formed along the width direction between the individual electrode pads and the common electrode pads on the first principal face of the actuator substrate for isolating the individual electrode pads and the common electrode pads from one another; an external substrate configured to be connected to the actuator substrate, the external substrate including: a plurality of individual electrode terminals formed at positions corresponding to the individual electrode pads of the actuator substrate, the individual electrode terminals being configured to be connected to the individual electrode pads; and a plurality of common electrode terminals formed at positions corresponding to the common electrode pads of the actuator substrate, the common electrode terminals being configured to be connected to the common electrode pads; and connection wiring configured to connect the common electrode terminals of the external substrate to each other, the connection wiring being formed along the groove of the actuator substrate between the individual electrode terminals and the common electrode terminals to prevent an electrical short circuit between the connection wiring and the individual electrodes.