Alkoxyaminosilane compounds and applications thereof

摘要

Alkoxyaminosilane compounds having formula I, and processes and compositions for depositing a silicon-containing film, are described herein:
(R1R2)NSiR3OR4OR5  Formula (I)
wherein R1 is independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group; R2 and R3 are each independently selected from hydrogen; a linear or branched C1 to C10 alkyl group; a C3 to C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group; and R4 and R5 are each independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group.

主权项

1. An alkoxyaminosilane for depositing a silicon-containing film having a general formula (I):
(R1R2)NSiR3OR4OR5  Formula (I)wherein R1 is independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group; R2 and R3 are each independently selected from hydrogen; a linear or branched C1 to C10 alkyl group; a C3 to C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group; and R4 and R5 are each independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group, wherein R1 and R2 are linked to form a ring or R1 and R2 are not linked to form a ring and wherein R4 and R5 are linked to form a ring or R4 and R5 are not linked to form a ring; and
wherein R1 is selected from tert-butyl and tert-pentyl; and R4 and R5 comprise C1 to C5 alkyl groups selected from ethyl, n-propyl, iso-propyl, n-butyl, sec-butyl, iso-butyl, and tert-butyl.