发明名称 |
PALLET TABLE FOR SUPPORTING SEMICONDUCTOR PACKAGES |
摘要 |
Disclosed is a pallet table for supporting semiconductor packages, comprising: a vacuum panel having an adsorption area forming vacuum holes to vacuum-absorb semiconductor packages; a main body coupled to the bottom part of the vacuum panel and forming a vacuum chamber connected with the vacuum holes; and a plurality of partitions to divide the vacuum chamber into a plurality of spaces. |
申请公布号 |
KR20150133974(A) |
申请公布日期 |
2015.12.01 |
申请号 |
KR20140060684 |
申请日期 |
2014.05.21 |
申请人 |
SEMES CO., LTD. |
发明人 |
CHUNG, CHUNG IL;YEO, HUNG BIN |
分类号 |
H01L21/683;B23Q3/08 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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