发明名称 PALLET TABLE FOR SUPPORTING SEMICONDUCTOR PACKAGES
摘要 Disclosed is a pallet table for supporting semiconductor packages, comprising: a vacuum panel having an adsorption area forming vacuum holes to vacuum-absorb semiconductor packages; a main body coupled to the bottom part of the vacuum panel and forming a vacuum chamber connected with the vacuum holes; and a plurality of partitions to divide the vacuum chamber into a plurality of spaces.
申请公布号 KR20150133974(A) 申请公布日期 2015.12.01
申请号 KR20140060684 申请日期 2014.05.21
申请人 SEMES CO., LTD. 发明人 CHUNG, CHUNG IL;YEO, HUNG BIN
分类号 H01L21/683;B23Q3/08 主分类号 H01L21/683
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