发明名称 从工件中同时切割出多个厚度特别均匀之切片的方法;METHOD FOR SIMULTANEOUSLY CUTTING A MULTIPLICITY OF SLICES OF PARTICULARLY UNIFORM THICKNESS FROM A WORKPIECE
摘要 一种用于沿着严格的凸状切割面从圆柱形工件同时切割出多个切片的方法,包括藉助于安装条带和线锯的供给器具以工件的轴线平行于线导辊的轴线地保持工件;藉助于供给设备通过线锯的线栅垂直地从上方移动工件,其中线栅是藉由围绕线导辊缠绕线并于垂直于线导辊轴线的线导辊中的凹槽中引导该线,而由彼此平行且在一个平面内的多个线部分形成的;并且向线部分供给一作为切割器具之坚硬物质于载液中的悬浮液,而具有纵向张力的线部分由于线导辊的转动在第一旋转方向和与第一旋转方向相反的第二旋转方向之间的连续交变的结果而相对于工件作相对运动,其中在沿第一方向转动期间,线被移动第一长度,并且在沿第二方向转动期间,线被移动第二长度,并且第二长度被选择成比第一长度短,其中,在切割操作开始时,选择第一纵向线张力,并且在切割操作结束时,选择第二纵向线张力,其中第一纵向张力被选择成系大于第二纵向张力。; moving the workpiece perpendicularly from above, by means of the feed device, through a grid of the wire saw, wherein the grid is formed from a multiplicity of portions of a wire, which run parallel to each other and in one plane, by winding the wire around the wire guide rollers and guiding it in grooves in the wire guide rollers that are perpendicular to the axes of the wire guide rollers; and supplying a suspension of hard substances in a carrier liquid, as cutting means, to the wire portions, while the wire portions, having a longitudinal tension, describe a relative motion in relation to the workpiece as a result of rotation of the wire guide rollers with continual alternation between a first direction of rotation and a second direction of rotation, which is opposite to the first direction of rotation, wherein, during the rotation in the first direction, the wire is moved by a first length, and during the rotation in the second direction, the wire is moved by a second length, and the second length is selected so as to be shorter than the first, characterized in that, at the start of the cutting operation a first longitudinal wire tension is selected, and at the end of the cutting operation a second longitudinal wire tension is selected, wherein the first longitudinal tension is selected so as to be greater than the second longitudinal tension.
申请公布号 TW201545225 申请公布日期 2015.12.01
申请号 TW104113372 申请日期 2015.04.27
申请人 世创电子材料公司 SILTRONIC AG 发明人 皮兹奇 乔治 PIETSCH, GEORG
分类号 H01L21/304(2006.01);B23D57/00(2006.01) 主分类号 H01L21/304(2006.01)
代理机构 代理人 陈翠华
主权项
地址 德国 DE