发明名称 |
Semiconductor element and solid-state imaging device |
摘要 |
A semiconductor element encompasses a charge-transfer path defined in a semiconductor region (34.35), configured to transfer signal charges, (b) a pair of first field-control electrodes (42a, 42b) laminated via an insulating film on the semiconductor region so as to sandwich the charge-transfer path in between, and a pair of second field-control electrodes (43a, 43b) arranged separately from and adjacently to the first field-control electrodes (42a, 42b). By applying field-control voltages differing from each other, to the first and second field-control electrodes (43a, 43b), a depleted potential in the charge-transfer path is changed, and a movement of the signal charges transferring in the semiconductor region is controlled. Because electric field can be made constant over a long distance along the charge-transfer direction, a semiconductor element and a solid-state imaging device, in which problems caused by interface defects and the like are avoided, can be provided. |
申请公布号 |
US9202902(B2) |
申请公布日期 |
2015.12.01 |
申请号 |
US201314419341 |
申请日期 |
2013.08.01 |
申请人 |
National University Corporation Shizuoka University |
发明人 |
Kawahito Shoji |
分类号 |
H01L27/00;H01L29/768;H01L27/148;H01L27/146;H04N5/369;H04N5/372;H04N5/374 |
主分类号 |
H01L27/00 |
代理机构 |
NDQ&M Watchstone LLP |
代理人 |
NDQ&M Watchstone LLP |
主权项 |
1. A semiconductor element, comprising:
a charge-transfer path defined in a semiconductor region, configured to transfer signal charges; a pair of first field-control electrodes laminated via an insulating film on the semiconductor region so as to sandwich the charge-transfer path in between, in a planar pattern, along a direction orthogonal to a transfer direction of the signal charges, and a pair of second field-control electrodes arranged separately from and adjacently to the first field-control electrodes, respectively, along the transfer direction, and laminated via the insulating film on the semiconductor region, so as to sandwich the charge-transfer path in between, in the planar pattern, along the direction orthogonal to the transfer direction, wherein field-control voltages, which differ from each other, are applied to the first and second field-control electrodes, and a depleted potential in the charge-transfer path is changed, thereby controlling a movement of the signal charges transferring in the semiconductor region. |
地址 |
Shizuoka JP |