发明名称 Semiconductor element and solid-state imaging device
摘要 A semiconductor element encompasses a charge-transfer path defined in a semiconductor region (34.35), configured to transfer signal charges, (b) a pair of first field-control electrodes (42a, 42b) laminated via an insulating film on the semiconductor region so as to sandwich the charge-transfer path in between, and a pair of second field-control electrodes (43a, 43b) arranged separately from and adjacently to the first field-control electrodes (42a, 42b). By applying field-control voltages differing from each other, to the first and second field-control electrodes (43a, 43b), a depleted potential in the charge-transfer path is changed, and a movement of the signal charges transferring in the semiconductor region is controlled. Because electric field can be made constant over a long distance along the charge-transfer direction, a semiconductor element and a solid-state imaging device, in which problems caused by interface defects and the like are avoided, can be provided.
申请公布号 US9202902(B2) 申请公布日期 2015.12.01
申请号 US201314419341 申请日期 2013.08.01
申请人 National University Corporation Shizuoka University 发明人 Kawahito Shoji
分类号 H01L27/00;H01L29/768;H01L27/148;H01L27/146;H04N5/369;H04N5/372;H04N5/374 主分类号 H01L27/00
代理机构 NDQ&M Watchstone LLP 代理人 NDQ&M Watchstone LLP
主权项 1. A semiconductor element, comprising: a charge-transfer path defined in a semiconductor region, configured to transfer signal charges; a pair of first field-control electrodes laminated via an insulating film on the semiconductor region so as to sandwich the charge-transfer path in between, in a planar pattern, along a direction orthogonal to a transfer direction of the signal charges, and a pair of second field-control electrodes arranged separately from and adjacently to the first field-control electrodes, respectively, along the transfer direction, and laminated via the insulating film on the semiconductor region, so as to sandwich the charge-transfer path in between, in the planar pattern, along the direction orthogonal to the transfer direction, wherein field-control voltages, which differ from each other, are applied to the first and second field-control electrodes, and a depleted potential in the charge-transfer path is changed, thereby controlling a movement of the signal charges transferring in the semiconductor region.
地址 Shizuoka JP