Susceptor heater shim

摘要

A substrate supporting assembly in a reaction space includes a heater, a substrate support member, and a shim positioned between the heater and the substrate support member. The shim may be removably secured between the heater and the substrate support member. The shim may further include an inner surface defining a perimeter of a gap. The gap may be further defined by a bottom surface of the substrate support member and a top surface of the heater. The substrate support member may further include a shoulder positioned radially outside of a substrate support position and wherein the shim inner surface is radially aligned with the substrate support member shoulder.

主权项

1. A substrate supporting assembly in a reaction space comprising:
a heater; a substrate support member having a top surface to receive a substrate and a shoulder about the top surface; and a shim positioned between the heater and the substrate support member, wherein the shim comprises an inner surface defining a perimeter of a gap, wherein the shim comprises an inner perimeter approximately equal an outside perimeter of the top surface and an outer perimeter approximately equal the outer perimeter of the shoulder, and wherein the heater provides radiant heat via the gap to the substrate support member.