Method of making polycrystalline monolithic magnesium aluminate spinels

摘要

Methods of making polycrystalline monolithic magnesium aluminate spinels are disclosed. The polycrystalline monolithic magnesium aluminate spinels have small grain sizes and may be deposited on substrates as thick one-piece deposits. The polycrystalline monolithic magnesium aluminate spinels may be prepared and deposited by chemical vapor deposition using magnesium and aluminum gaseous precursors.

主权项

1. A method comprising:
a) providing gaseous precursors of polycrystalline monolithic magnesium aluminate in a chemical vapor deposition chamber, wherein a source of magnesium is chosen from magnesium halides and a source of aluminum is chosen from aluminum halides, aluminum carbonyls and aluminum acetonates and a source of oxygen is chosen from O2, CO2, NO2, H2O2, O3, N2O and H2O; b) reacting the gaseous precursors in the chemical vapor deposition chamber; and c) chemical vapor depositing polycrystalline monolithic magnesium aluminate on a substrate in the chemical vapor deposition chamber at a deposition rate of 0.1 μm/minute to 5 μm/minute, the temperature of the substrate is 700° C. to 1400° C.