Position-measuring device and system having a plurality of position-measuring devices

摘要

In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.

主权项

1. A position-measuring device for determining a position of an object along a third axis oriented perpendicularly to two orthogonal, first and second main axes of motion of the object, comprising:
a light source adapted to emit a beam of rays along the first main axis of motion in a direction of the object; a measuring standard arranged on the object and including graduation markings disposed periodically along the third axis; at least one reflector arranged along the third axis and set apart from the object; a retroreflector system; and a detector system; wherein position signals with respect to motion of the object along the third axis are generatable from superposition of a measuring beam and a reference beam produced from the beam of rays.