一种防尘薄膜组件制造装置，其具备贴合单元，所述贴合单元包括：贴合腔室、以及排气管，所述贴合腔室进行包含防尘薄膜组件框的防尘薄膜组件框构件与包含防尘薄膜的防尘薄膜构件的贴合，所述防尘薄膜组件框具有设置于厚度方向的一端面及另一端面的至少一者的沟槽以及贯通外周面与所述沟槽的壁面之间的通孔，所述排气管用以于将所述防尘薄膜组件框构件及所述防尘薄膜构件以所述防尘薄膜组件框的设置有所述沟槽的端面与所述防尘薄膜构件相对向的方式配置于所述贴合腔室内的状态下，经由所述防尘薄膜组件框的所述通孔而对所述沟槽的内部进行排气。; and an evacuation tube for evacuating the inside of the groove via the through-hole in a state in which the pellicle frame member and the pellicle film member are arranged in the bonding chamber such that the end face of the pellicle frame member at which the groove is formed and the pellicle film member oppose each other.
