Autotuned screen printing process

摘要

Embodiments of the invention generally provide apparatus and methods of screen printing a pattern on a substrate. In one embodiment, a patterned layer is printed onto a surface of a substrate along with a plurality of alignment marks. The locations of the alignment marks are measured with respect to a feature of the substrate to determine the actual location of the patterned layer. The actual location is compared with the expected location to determine the positional error of the patterned layer placement on the substrate. This information is used to adjust the placement of a patterned layer onto subsequently processed substrates.

主权项

1. An automated deposition process, comprising:
positioning a first substrate on a substrate support, wherein the first substrate has at least one edge; depositing a layer of a material in a pattern onto a surface of the first substrate, wherein the pattern includes at least two alignment marks; determining the actual orientation and position of the at least two alignment marks with respect to the at least one edge of the first substrate using a system controller; and depositing a layer of a material in a pattern onto a surface of a second substrate in an adjusted orientation or adjusted position relative to at least one edge of the second substrate using the information received by the system controller during the determining the actual orientation and actual position of the at least two alignment marks, wherein the orientation or position of the material deposited on the second substrate is closer to an expected orientation or expected position than the orientation or position of the material deposited on the first substrate to the expected orientation or expected position.