Method and apparatus for gas delivery

摘要

Methods and apparatus for gas delivery are disclosed herein. In some embodiments, a gas delivery system includes an ampoule for storing a precursor in solid or liquid form, a first conduit coupled to the ampoule and having a first end coupled to a first gas source to draw a vapor of the precursor from the ampoule into the first conduit, a second conduit coupled to the first conduit at a first junction located downstream of the ampoule and having a first end coupled to a second gas source and a second end coupled to a process chamber, and a heat source configured to heat the ampoule and at least a first portion of the first conduit from the ampoule to the second conduit and to heat only a second portion of the second conduit, wherein the second portion of the second conduit includes the first junction.

主权项

1. A gas delivery system, comprising:
an ampoule for storing a precursor in solid or liquid form; a first conduit coupled to the ampoule and having a first end coupled to a first gas source to draw a vapor of the precursor from the ampoule into the first conduit; a second conduit coupled to the first conduit at a first junction located downstream of the ampoule and having a first end coupled to a second gas source and a second end coupled to a process chamber; a heat source configured to heat the ampoule and at least a first portion of the first conduit, the first portion extending from a location upstream of the ampoule to the second conduit, and to heat only a second portion of the second conduit, wherein the second portion of the second conduit includes the first junction; and a third conduit coupled to the second conduit at a second junction located outside of the second portion, the third conduit having a first end coupled to the second junction and a second end coupled to a vent.