Method and system for non-destructive distribution profiling of an element in a film

摘要

A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.

主权项

1. A method comprising:
computing a set of statistical coefficients characteristic of a set of spectra, said set of statistical coefficients organized in a database as a function of selected parameters that define a reference film; simulating a background spectrum for a sample film using said database and a known parameter for said sample film; and subtracting said background spectrum from a measured spectrum for said sample film to generate a processed spectrum for said sample film.