On-chip temperature sensor using interconnect metal

摘要

An accurate, cost-efficient temperature sensor may be integrated into an integrated circuit (IC) using common materials as the IC's interconnect metallization. The temperature sensor may include an impedance element having a length of metal made of the interconnect metal, a current source connected between a first set of contacts at opposite ends of the impedance element, and an analog-to-digital converter connected between a second set of contacts at opposite ends of the impedance element. The temperature sensor may exploits the proportional relationship between the metal's resistance and temperature to measure ambient temperature. Alternatively, such a temperature sensor may be used on disposable chemical sensors where the impedance element is made of a common metal as conductors that connect a sensor reactant to sensor contacts. In either case, because the impedance element is formed of a common metal as other interconnect, it is expected to incur low manufacturing costs.

主权项

1. An integrated circuit, comprising:
a plurality of electrical components provided in a substrate and interconnected by an interconnect metal, and a temperature sensor, comprising:
an impedance element having a length of metal made of the interconnect metal and having pairs of contacts at opposite ends of the length, wherein the impedance element has a folded serpentine pattern,a current source connected between a first set of the contacts at opposite ends of the length, andan analog-to-digital converter connected between a second set of the contacts at opposite ends of the length.