发明名称 CLEANING COMPOSITION AND CLEANING METHOD
摘要 The present invention provides a cleaning composition, capable of simultaneously inhibiting the occurrence of corrosion or defects in a circuit material and a barrier metal material used in a circuit board, and effectively removing a metal oxide film or organic residues on the circuit board; and a cleaning method using the cleaning composition. The cleaning composition in accordance with the present invention comprises: (A) one or more compounds selected from the group consisting of fatty acid having a hydrocarbon group with 8 to 20 carbon atoms, phosphoric acid having a hydrocarbon group with 3 to 20 carbon atoms, sulfuric ester having a hydrocarbon group with 3 to 20 carbon atoms, alkenyl succinic acid having a hydrocarbon group with 3 to 20 carbon atoms, and salts thereof; (B) organic acids; (C) water soluble amine; (D) a water soluble polymer; and an aqueous medium. In addition, the cleaning composition has a pH higher than or equal to 9.
申请公布号 KR20150133641(A) 申请公布日期 2015.11.30
申请号 KR20150067916 申请日期 2015.05.15
申请人 JSR CORPORATION 发明人 HAYAMA TAKAHIRO;ARAKAWA MEGUMI;KUSHIDA YUKI;MITSUMOTO KIYOTAKA;KAMEI YASUTAKA;NODA MASAHIRO;YAMANAKA TATSUYA
分类号 C11D7/22;C11D7/26;C11D7/32;C11D7/34;H01L21/02 主分类号 C11D7/22
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