METHOD FOR REGENERATING CERIUM-BASED ABRASIVE

摘要

IT IS AN OBJECT OF THE PRESENT INVENTION TO PROVIDE A TECHNIQUE FOR REGENERATING A CERIUM-BASED ABRASIVE, THE TECHNIQUE EFFICIENTLY REMOVES A GLASS COMPONENT CONTAINED IN A USED CERIUM-BASED ABRASIVE SLURRY, RECOVERING A POLISHING SPEED, AND SUPPRESSING GENERATION OF POLISHING SCRATCHES. THE PRESENT INVENTION PROVIDES A METHOD FOR REGENERATING A WASTE ABRASIVE SLURRY FOR REGENERATING THE USED CERIUM-BASED ABRASIVE SLURRY. THE METHOD INCLUDES THE STEPS OF ADDING AT LEAST ONE SELECTED FROM AN ACID CONTAINING NO HYDROFLUORIC ACID AND A SALT THEREOF TO THE USED CERIUM-BASED ABRASIVE SLURRY TO BRING THE USED CERIUM-BASED ABRASIVE SLURRY INTO A SLURRY STATE; AND STIRRING THE SLURRY AT A PERIPHERAL SPEED OF 4 M/SEC OR GREATER.