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发明名称
A COMPOSITION OF ANTI-REFLECTIVE HARDMASK
摘要
The present invention relates to a hardmask composition for anti-reflection comprising: (a) a carbazole derivative polymer represented by chemical formula 1 or a polymer blend comprising the same; and (b) an organic solvent.
申请公布号
KR101572594(B1)
申请公布日期
2015.11.27
申请号
KR20150046115
申请日期
2015.04.01
申请人
CHOI, SANG JUN
发明人
CHOI, SANG JUN
分类号
G03F7/09;G03F7/11
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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