| 摘要 |
A non-contact transfer hand (1) includes a suction holding plate (2) and a lid portion (8). The suction holding plate (2) has a flat-shaped suction surface (2a) as a front surface, a non-suction surface (2b) as a back surface, and a chamber (3). The suction surface has a gas discharge groove (10). The non-suction surface has a gas supply groove (6) that has a gas introduction port (6d). The chamber (3) communicates with an end of the gas supply groove. A wall surface (3a) of the chamber has an inlet (10a). The gas supply groove is configured to supply gas from the gas introduction port toward the chamber. The gas discharge groove communicates with the chamber via the inlet, and is configured to discharge the gas in a direction apart from the chamber. The lid portion is fixed on the non-suction surface to cover the gas supply groove and the chamber. |
