发明名称 GRINDING WHEEL AND CLEANING METHOD FOR GRINDING CHAMBER
摘要 A grinding wheel includes an annular base and a plurality of abrasive members fixed to the lower surface of the base and arranged annularly. The base has a plurality of through holes for discharging a grinding water. The plural through holes radially extend from the inner side surface to the outer side surface of the base. The plural through holes are arranged at given intervals in the circumferential direction of the base so that the grinding water is scattered in different directions from the through holes.
申请公布号 SG10201501986Y(A) 申请公布日期 2015.11.27
申请号 SG10201501986Y 申请日期 2015.03.16
申请人 DISCO CORPORATION 发明人 TAKAHIKO TSUNO
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