LINEAR MOTOR, STAGE DEVICE, LITHOGRAPHIC APPARATUS, AND MANUFACTURING METHOD OF ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a linear motor advantageous for at least one of assembly and maintenance.SOLUTION: There is provided a linear motor having: a coil including two linear portions along a first direction as a longer direction; a pair of cooling tubes which oppose to each other via the two linear portions and provided along the first direction; a magnet in which a hollow part into which the coil and the pair of cooling tubes are inserted is formed; and attachments which are attached to the pair of cooling tubes and in which a channel of coolant for the pair of cooling tubes is formed, in which each of the pair of cooling tubes includes protrusions protruded from the coil in the first direction, and the attachments are attached to the protrusions such that the coil and the pair of cooling tubes can be inserted into the hollow part in the state where the attachments are attached.