| 摘要 |
PROBLEM TO BE SOLVED: To prevent burr from being formed in an edge part of a hole after laser processing.SOLUTION: A beam shaping mask 1 has an opening 4 similar to an opening pattern 20 created by laser processing to a film 15. The opening 4 is formed so as to have the light transmittance within the opening 4 progressively decreasing from a central part to a peripheral edge part, and have the light transmittance which can ensure at least the minimum laser intensity sufficient to allow laser processing to the film 15 in the peripheral edge part. |
