APPARATUS AND METHOD OF APPLYING SMALL-ANGLE ELECTRON SCATTERING TO CHARACTERIZE NANOSTRUCTURES ON OPAQUE SUBSTRATE

摘要

An apparatus and methods for small-angle electron beam scattering measurements in a reflection or a backscattering mode are provided. The apparatus includes an electron source, electron collimation optics before a sample, electron projection optics after the sample, a sample stage capable of holding the sample, and a electron detector module. The electrons emitted from the source are collimated and positioned to impinge nanostructures on the sample. The signals resulting from the interactions between the impinging electrons and the nanostructures are further magnified by the electron projection optics to reach a sufficient angular resolution before recorded by the electron detector module.

主权项

1. A high angular resolution electron scattering apparatus for characterizing surface features in nanometers from a sample in either a reflection mode, or a backscattering mode or both, wherein the sample comprises an opaque substrate which is made of materials with a thickness that is impenetrable by electrons in KeV ranges, and the sample has a diameter of up to 40 cm or larger, the electron scattering apparatus comprising:
a sample stage configured to hold the sample; an electron source configured to produce an electron beam; a plurality of electron collimation optics configured to receive the electron beam from the electron source and direct the electron beam to the sample stage; a plurality of electron projection optics; and an electron detector module, wherein the electron projection optics are configured to receive scattered/reflected electrons from the sample and direct the scattered electrons to the electron detector module, wherein a value of effective distance from the sample to the electron detector module is up to about 100 meters or more; wherein angular resolution is in a range from about 10−4 rad to about 10−5 rad, and the electron collimation optics and the electron projection optics are configured and operated in coordination to achieve the angular resolution.