MULTILAYER COATING, METHOD FOR MANUFACTURING MULTILAYER COATING, AND USE OF MULTILAYER COATING

摘要

PROBLEM TO BE SOLVED: To provide a multilayer coating on a substrate, and a method for manufacturing a multilayer coating that minimizes the diffusion of atoms between layers.SOLUTION: A method for manufacturing a multilayer coating comprises: introducing a substrate 3 into a reaction space, and depositing a layer of a first material 1 on the substrate 3 and depositing a layer of a second material 2 on the layer of the first material 1; alternately introducing precursors into the reaction space by the deposition of the layer of the first material 1 and the layer of the second material 2; and purging the reaction space after the introduction of the precursors. The first material 1 is one selected from the group consisting of titanium oxide and aluminum oxide, and the second material 2 is the other selected from the group consisting of titanium oxide and aluminum oxide. A boundary region is formed between titanium oxide and aluminum oxide.