| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of making improvement of energy efficiency of heater heating and quick cooling compatible.SOLUTION: In a thermal treatment device 1, a column 11 provided between a heater 5 and an active cooling plate 7 includes a heat conduction part 15 and a heat insulation part 17. When heating a mounting plate 3, a rotary drive part 13 disposes the heat conduction part 15 of the heater 11 closer to the active cooling plate 7 and disposes the heat insulation part 17 of the column 11 closer to the heater 5. Since the heat insulation part 17 is disposed closer to the heater 5, discharge of heat from the heater 5 is suppressed. Further, the heat conduction part 1 is sufficiently cooled by the active cooling plate 7. When cooling the mounting plate 3, on the other hand, the rotary drive part 13 disposes the heat conduction part 15 closer to the heater 5 and disposes the heat insulation part 17 closer to the active cooling plate 7. Since the heat conduction part 15 is disposed closer to the heater 5, heat of the mounting plate 3 is absorbed without stopping by the sufficiently cooled heat conduction part 15. |
