PROBE PIN CAPABLE OF BEING USED FOR FINE PITCH, PROBE CARD, AND THE FABRICATION METHOD THEREOF

摘要

A probe pin according to the present invention includes a probe beam region which is connected to a circuit pattern of a probe substrate, and a probe tip region which is in contact with a contact pad of a semiconductor device. The probe beam region includes a first metal pattern of a strip type, a second metal pattern which is stacked on the first metal pattern and is longer than the first metal pattern, and a third metal pattern which is stacked on the second metal pattern. The length of the third metal pattern is substantially equal to the length of the first metal pattern. The probe tip region has a 2D structure protruding from the front end of the second metal pattern in the direction of the contact pad. According to the configuration of the present invention, an inspection is performed by dealing with the fine pitch of the semiconductor device.