| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element capable of suppressing inflow of a conductive adhesive to the vibration part side of the base, reliably at a slit, when forming a slit in the base, and to provide a method of manufacturing the same.SOLUTION: A base 11 has an upper surface 111 and a lower surface 112 in the thickness direction, and the lower surface 112 is fixed to an element mounting member by means of a conductive adhesive 31. Outer slits 15a, 15b are formed in the outer periphery of the base 11, so as to penetrate the upper surface 111 and lower surface 112. Inner slits 16a, 16b are formed in the inner periphery of the outer slits 15a, 15b so as to bring about a state recessed from the upper surface 111 and lower surface 112, respectively, in the thickness direction. Thin wall portions 17a, 17b are provided, respectively, in the inner slits 16a, 16b. |
