发明名称 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
摘要 In One method for manufacturing a semiconductor device, a conductive bump is formed on the surface of a semiconductor wafer so as to create a first bump opening area, and a dummy bump is formed on the surface of the semiconductor wafer so as to form a second bump opening area. In such a case, the dummy bump is formed such that the total of the first bump opening area and the second bump opening area is a value corresponding to the opening area of a conductive bump of a semiconductor wafer having only the conductive bump, whereby the semiconductor device is manufactured.
申请公布号 US2015340339(A1) 申请公布日期 2015.11.26
申请号 US201414761545 申请日期 2014.01.14
申请人 Sacho Yutaka 发明人 Sacho Yutaka
分类号 H01L25/065;H01L23/00;H01L21/78 主分类号 H01L25/065
代理机构 代理人
主权项 1. A method for manufacturing a semiconductor device, the method comprising: forming a first bump on the surface of a first wafer in such a way as to achieve a first bump opening area, and forming a dummy bump on the surface of the first wafer in such a way as to achieve a second bump opening area; wherein forming the dummy bump comprises forming the dummy bump in such a way that the total of the first bump opening area and the second bump opening area is a value corresponding to the first bump opening area of a second wafer, which is another wafer having only the first bump.
地址 Tokyo JP