发明名称 |
SINTERED OXIDE, SPUTTERING TARGET, AND OXIDE SEMICONDUCTOR THIN-FILM OBTAINED USING SAME |
摘要 |
Provided are: a sintered oxide which achieves low carrier density and high carrier mobility when configured as an oxide semiconductor thin-film by using the sputtering method; and a sputtering target using the same. This sintered oxide contains indium, gallium and magnesium as oxides. It is preferable for the gallium content to be 0.20-0.45, inclusive, in terms of an atomic ratio (Ga/(In+Ga)), the magnesium content to be at least 0.0001 and less than 0.05 in terms of an atomic ratio (Mg/(In+Ga+Mg)), and the sintering to occur at 1,200-1,550°C, inclusive. An amorphous oxide semiconductor thin-film obtained by forming this sintered oxide as a sputtering target is capable of achieving a carrier density of less than 3.0×1018cm-3, and a carrier mobility of 10cm2V-1sec-1 or higher. |
申请公布号 |
WO2015178429(A1) |
申请公布日期 |
2015.11.26 |
申请号 |
WO2015JP64527 |
申请日期 |
2015.05.20 |
申请人 |
SUMITOMO METAL MINING CO., LTD. |
发明人 |
NAKAYAMA, TOKUYUKI;NISHIMURA, EIICHIRO;MATSUMURA, FUMIHIKO;IWARA, MASASHI |
分类号 |
C04B35/00;C23C14/08;C23C14/34;H01L21/363 |
主分类号 |
C04B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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