Multi-chip Package Module And A Doped Polysilicon Trench For Isolation And Connection

摘要

A circuit module comprises a die attach pad with a surface and a plurality of leads surrounding the surface. A nonconductive adhesive is on the surface. A plurality of electronic circuit dies are on the surface of the die attach pad. Each die has a top surface and a bottom surface with the bottom surface on the adhesive. The top surface has a plurality of bonding pads. A first electronic circuit die has at least one routing path of a conductive material connecting a first bonding pad to a second bonding pad. A first bonding wire connects a bonding pad of a second electronic circuit die to the first bonding pad of the first electronic die. A second bonding wire connects the second bonding pad of the first electronic circuit die to a lead. Where one of the dies contains vertical circuit element, where a doped layer forms a terminal along the bottom surface of the layer, a trench filled with doped polysilicon extends from the top surface to the terminal to connect to the terminal. The doped polysilicon filled trench also serves to isolate and separate different circuit elements.

主权项

1. A semiconductor device comprising:
a silicon layer of substantially single crystal, having a bottom surface and a top surface; a doped layer forming a terminal near the bottom surface of said layer; and a trench filled with doped polysilicon with said trench extending from said top surface to said terminal.