TWO-DIMENSIONAL OPTICAL DEFLECTOR INCLUDING TWO SOI STRUCTURES AND ITS MANUFACTURING METHOD

摘要

A two-dimensional optical deflector includes a first SOI structure and a second SOI structure. A height of a monocrystalline silicon support layer of the first SOI structure is smaller than a height of a monocrystalline silicon support layer of the second SOI structure. A mirror includes a monocrystalline silicon active layer of the first SOI structure. An inner frame, an inner piezoelectric actuator and an outer frame include a monocrystalline silicon active layer of the first SOI structure and the monocrystalline silicon active layer of the second SOI structure. An outer piezoelectric actuator includes the monocrystalline silicon active layer of the first SOI structure.

主权项

1. A two-dimensional optical deflector comprising:
a first SOI structure consisting of a first monocrystalline silicon support layer, a first monocrystalline silicon active layer and a first intermediate silicon dioxide layer sandwiched by said first monocrystalline silicon support layer and said first monocrystalline silicon active layer; a second SOI structure consisting of a second monocrystalline silicon support layer, a second monocrystalline silicon active layer and a second intermediate silicon dioxide layer sandwiched by said second monocrystalline silicon support layer and said second monocrystalline silicon active layer, a height of said first monocrystalline silicon support layer being smaller than a height of said second monocrystalline silicon support layer; a mirror; an inner frame surrounding said mirror; an inner piezoelectric actuator coupled between said mirror and said inner frame and adapted to rock said mirror around a first axis; an outer frame surrounding said inner frame; and an outer piezoelectric actuator coupled between said inner frame and said outer frame and adapted to rock said mirror around a second axis, wherein said mirror includes said second monocrystalline silicon active layer without said first monocrystalline silicon active layer, wherein said inner frame, said inner piezoelectric actuator and said outer frame include said first monocrystalline silicon active layer and said second monocrystalline silicon active layer, and wherein said outer piezoelectric actuator includes said first monocrystalline silicon active layer without said second monocrystalline silicon active layer.