HEATER POWER FEEDING MECHANISM

摘要

Provided is a heater power feeding mechanism capable of zone-by-zone temperature control by dividing a stage on which a substrate is mounted into a plurality of zones using a plurality of heaters, the heater power feeding mechanism comprising: a plurality of heater terminals connected to the plurality of heaters; a plurality of heater wires connected to the plurality of heater terminals; and an offset structure for offsetting the plurality of heater wires, the plurality of heater terminals being disposed on an outer peripheral portion of a holding plate that holds the stage.