PLASMA GENERATOR WITH MEASUREMENT DEVICE, AND PLASMA PROPELLER

摘要

PROBLEM TO BE SOLVED: To provide a plasma generator including a measurement device capable of stably and appropriately controlling the situation of plasma, and a plasma propeller employing the same.SOLUTION: A plasma generator 1 including the measurement device includes: a discharge container 100 which generates plasma by ionizing a gas introduced to the inside; an emission monitor 200 for measuring an electron density of the plasma from an emission spectrum of the plasma; a probe measuring instrument 205 for measuring the electron density of the plasma with a probe 204 disposed in the discharge container 100; a control device 203 for controlling at least one of a power amount to be supplied to a cathode 103, magnetic field distribution and a supply gas amount on the basis of measurement results of the electron density of the plasma by the emission monitor 200 and the probe measuring instrument 205; and an optical axis drive part 202 for changing an optical axis X1 of light incident from the plasma to the emission monitor 200.