| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for improving a performance of a substrate carrier.SOLUTION: A method for modifying a substrate carrier to improve process performance includes depositing material or manufacturing a device on a substrate supported by the substrate carrier. Then, a parameter of layers deposited on the substrate is measured as a function of their corresponding positions on the substrate carrier. The measured parameter of at least some devices manufactured on the substrate or a property of the deposited layers is related to a physical characteristic of the substrate carrier to obtain a plurality of physical characteristics of the substrate carrier corresponding to a plurality of positions on the substrate carrier. Then, the physical characteristic of the substrate carrier is modified at one or more of the plurality of corresponding positions on the substrate carrier to obtain desired parameters of the deposited layers or manufactured devices as a function of the position on the substrate carrier. |
