发明名称 |
METHOD FOR MANUFACTURING AN OPENING STRUCTURE AND OPENING STRUCTURE |
摘要 |
A method for manufacturing an opening structure is provided. The method may include: forming a patterned mask over a first side of a carrier; forming material over the first side of the carrier covering at least a portion of the carrier; forming a first opening in the carrier from a second side of the carrier opposite the first side of the carrier to at least partially expose a surface of the patterned mask; and forming a second opening in the material from the second side of the carrier using the patterned mask as a mask. |
申请公布号 |
US2015341726(A1) |
申请公布日期 |
2015.11.26 |
申请号 |
US201414285839 |
申请日期 |
2014.05.23 |
申请人 |
Infineon Technologies AG |
发明人 |
FRIZA Wolfgang |
分类号 |
H04R7/14;H04R19/02;H04R31/00;H04R19/00;H04R19/04 |
主分类号 |
H04R7/14 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method for manufacturing an opening structure, the method comprising:
forming a patterned mask over a first side of a carrier; forming material over the first side of the carrier covering at least a portion of the carrier; forming a first opening in the carrier from a second side of the carrier opposite the first side of the carrier to at least partially expose a surface of the patterned mask; and forming a second opening in the material from the second side of the carrier using the patterned mask as a mask. |
地址 |
Neubiberg DE |