发明名称 METHOD FOR MANUFACTURING AN OPENING STRUCTURE AND OPENING STRUCTURE
摘要 A method for manufacturing an opening structure is provided. The method may include: forming a patterned mask over a first side of a carrier; forming material over the first side of the carrier covering at least a portion of the carrier; forming a first opening in the carrier from a second side of the carrier opposite the first side of the carrier to at least partially expose a surface of the patterned mask; and forming a second opening in the material from the second side of the carrier using the patterned mask as a mask.
申请公布号 US2015341726(A1) 申请公布日期 2015.11.26
申请号 US201414285839 申请日期 2014.05.23
申请人 Infineon Technologies AG 发明人 FRIZA Wolfgang
分类号 H04R7/14;H04R19/02;H04R31/00;H04R19/00;H04R19/04 主分类号 H04R7/14
代理机构 代理人
主权项 1. A method for manufacturing an opening structure, the method comprising: forming a patterned mask over a first side of a carrier; forming material over the first side of the carrier covering at least a portion of the carrier; forming a first opening in the carrier from a second side of the carrier opposite the first side of the carrier to at least partially expose a surface of the patterned mask; and forming a second opening in the material from the second side of the carrier using the patterned mask as a mask.
地址 Neubiberg DE