VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS

摘要

Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography.

主权项

1. A semiconductor die, comprising:
a substrate having an active front surface and a back surface; an integrated circuit disposed on the active front surface of the substrate; and an inductor disposed above the back surface of the substrate and coupled to the integrated circuit, wherein both an uppermost surface and a lowermost surface of the inductor have an undulating topography based on centrally rounded protrusions.