MECHANICAL DESIGN OF MULTIPLE ZONE PLATES PRECISION ALIGNMENT APPARATUS FOR HARD X-RAY FOCUSING IN TWENTY-NANOMETER SCALE

摘要

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

主权项

1. A multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale comprising:
a zone plate alignment base frame; a plurality of zone plates; a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing; at least one respective positioning stage driving and positioning each said respective zone plate holder; each said respective positioning stage being mounted on said zone plate alignment base frame; a respective linkage component coupling each said respective positioning stage and said respective zone plate holder; and said zone plate alignment base frame, each said zone plate holder and each said linkage component being formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.