STRIPPING APPARATUS AND METHOD USING THE SAME TO CLEAN GLASS SUBSTRATES

摘要

The present disclosure provides a stripping apparatus including a cleaning device, a transition unit and a stripping device. The cleaning device includes a first cleaning unit, a second cleaning unit and a third cleaning unit. The stripping device is connected with the transition unit; the transition unit is further connected with the first cleaning unit; the first cleaning unit is further connected with the second cleaning unit; the second cleaning unit is further connected with the third cleaning unit. Temperatures of the first cleaning unit, the second cleaning unit and the third cleaning unit are gradually decreased. The temperature of the third cleaning unit is equal to the temperature of water injected into the third cleaning unit.

主权项

1. A stripping apparatus comprising a cleaning device, a transition unit and a stripping device;
wherein the cleaning device at least comprises a first cleaning unit, a second cleaning unit and a third cleaning unit; the stripping device is connected with the transition unit; the transition unit is further connected with the first cleaning unit; the first cleaning unit is further connected with the second cleaning unit; the second cleaning unit is further connected with the third cleaning unit; a temperature in the third cleaning unit is set to be a first parameter; the first parameter is a value equal to a temperature of water injected into the third cleaning unit; a temperature in the second cleaning unit is set to be a second parameter; the second parameter is a value equal to a sum of the first parameter and an average value obtained by dividing an absolute value of a difference between a temperature of the stripping device and the first parameter by the total number of the cleaning units; a temperature of the first cleaning unit is set to be a difference between the temperature of the stripping device and the average value.