PIEZOELECTRIC THIN FILM, AND PIEZOELECTRIC THIN FILM ELEMENT

摘要

Provided is a piezoelectric thin film having piezoelectric properties which do not readily deteriorate. The piezoelectric thin film (3) includes: a potassium sodium niobate represented by general formula (1), namely (K1-xNax)NbO3; and CaTiO3. In the X-ray diffraction profile of the piezoelectric thin film (3), the lattice plane spacing calculated from the diffraction peak of the (001) plane is not more than 3.975Å. Furthermore, in the X-ray diffraction profile of the piezoelectric thin film (3), the ratio (I101/I001) of the diffraction peak intensity (I101) of the (101) plane to the diffraction peak intensity (I001) of the (001) plane satisfies log10(I101/I001)≤-2.10.