发明名称 X-RAY GENERATION TARGET, EXAMINATION SYSTEM, CONTROL DEVICE, CONTROL METHOD, AND CONTROL PROGRAM
摘要 An X-ray generation target (112) is provided with a substrate in one embodiment. Also, in the one embodiment, the X-ray generation target is provided with a plurality of first X-ray nano-targets (112f) that are disposed on the substrate, and that have a first size. Additionally, in the one embodiment, the X-ray generation target is provided with second X-ray nano-targets (112g) that are disposed on the substrate at positions specified by the first X-ray nano-targets (112f) and that have a second size, which is smaller than the first size.
申请公布号 WO2015178228(A1) 申请公布日期 2015.11.26
申请号 WO2015JP63366 申请日期 2015.05.08
申请人 TOKYO ELECTRON LIMITED 发明人 UMEHARA, YASUTOSHI;NAMIOKA, ICHIRO;KADOSAWA, KATSUJI
分类号 H01J35/08;G01N23/04;H05G1/00 主分类号 H01J35/08
代理机构 代理人
主权项
地址