发明名称 |
X-RAY GENERATION TARGET, EXAMINATION SYSTEM, CONTROL DEVICE, CONTROL METHOD, AND CONTROL PROGRAM |
摘要 |
An X-ray generation target (112) is provided with a substrate in one embodiment. Also, in the one embodiment, the X-ray generation target is provided with a plurality of first X-ray nano-targets (112f) that are disposed on the substrate, and that have a first size. Additionally, in the one embodiment, the X-ray generation target is provided with second X-ray nano-targets (112g) that are disposed on the substrate at positions specified by the first X-ray nano-targets (112f) and that have a second size, which is smaller than the first size. |
申请公布号 |
WO2015178228(A1) |
申请公布日期 |
2015.11.26 |
申请号 |
WO2015JP63366 |
申请日期 |
2015.05.08 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
UMEHARA, YASUTOSHI;NAMIOKA, ICHIRO;KADOSAWA, KATSUJI |
分类号 |
H01J35/08;G01N23/04;H05G1/00 |
主分类号 |
H01J35/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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