| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply method capable of surely preventing heat deformation, erosion and burning of a resin material in a component.SOLUTION: In a gas supply method that after decompressing fluorine mixed gas filled to a container 10 at high pressure through decompression means 11, supplies the gas to consumption equipment, in a pipeline from a container valve 10a of the container 10 to the decompression means 11, a filling and sealing step of filling inactive gas having higher pressure than supply pressure to the consumption equipment and lower pressure than filling pressure of the container is performed; and after the filling and sealing step, fluorine mixed gas is supplied to the consumption equipment. |
