POSITION DETECTION APPARATUS OF MICRO-ELECTROMECHANICAL SYSTEM AND DETECTION METHOD THEREOF

摘要

A position detection apparatus for detecting position information of a micro-electromechanical system apparatus includes an oscillating circuit, a carrier frequency detector, and a demodulator. The oscillating circuit generates an oscillating signal according to an equivalent capacitance provided by the micro-electromechanical system apparatus. The carrier frequency detector detects the oscillating signal to obtain a carrier frequency information of the oscillating signal. The demodulator demodulates the oscillating signal according to the carrier frequency information and thus obtains position information of the micro-electromechanical system apparatus.

主权项

1. A position detection apparatus adapted for detecting position information of a micro-electromechanical system, comprising:
an oscillating circuit, coupled to the micro-electromechanical system and generating an oscillating signal according to an equivalent capacitance provided by the micro-electromechanical system; a carrier frequency detector, coupled to the oscillating circuit and detecting the oscillating signal to obtain carrier frequency information of the oscillating signal; and a demodulator, coupled to the oscillating circuit and the carrier frequency detector, demodulating the oscillating signal according to the carrier frequency information to obtain the position information of the micro-electromechanical system.