CAPACITIVE MICROELECTRONIC AND/OR NANOELECTRONIC DEVICE WITH INCREASED COMPACTNESS

摘要

A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

主权项

1. A device with a mobile element extending according to a given plane comprising at least one first layer, one second layer and one third layer extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support, the device also comprising at least one capacitor of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitor comprising at least one mobile electrode secured to one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, the third layer comprising said at least one fixed electrode and said at least one mobile electrode, the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.