发明名称 |
METHOD FOR POSITIONING A FOCAL PLANE OF A LIGHT IMAGING DEVICE AND APPARATUS ARRANGED FOR APPLYING SAID METHOD |
摘要 |
The invention relates to a method for positioning a focal plane of a light imaging device at a surface of a substrate, wherein the substrate emits light when irradiated with charged particles. The method comprises the steps of: i. irradiating the substrate with a beam of charged particles having a set charged particle beam energy; ii. moving the focal plane of the light imaging device at least in a direction towards or away from the substrate and measuring an intensity of the emitted light as a function of the position of said focal plane with respect to the substrate; and iii. setting the focal plane at a focal position with respect to the substrate, said focal position being determined using the measured dependence of the intensity of the light signal as a function of the position. Preferably the method steps are subsequently repeated using a reduced charged particle beam energy. |
申请公布号 |
WO2015178774(A1) |
申请公布日期 |
2015.11.26 |
申请号 |
WO2015NL50368 |
申请日期 |
2015.05.22 |
申请人 |
DELMIC B.V. |
发明人 |
NARVAEZ, ANGELA CAROLINA;LIV HAMARAT, NALAN;KRUIT, PIETER;HOOGENBOOM, JACOB PIETER |
分类号 |
G02B21/00;G02B21/24;G02B21/26;H01J37/02;H01J37/22 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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