| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device advantageous for supplying an imprint material onto a substrate.SOLUTION: The imprint device configured to mold the imprint material supplied onto the substrate by using a mold includes: a supply section which includes a plurality of nozzles for discharging droplets of the imprint material toward the substrate and supplies the imprint material onto the substrate by discharging the droplets from the nozzles; and a control section for controlling the discharge of the droplets from the nozzles in accordance with a map indicating an arrangement of the droplets which should be supplied onto the substrate, on the substrate. On the basis of information relating to a discharge amount of the imprint material to be discharged as the droplets from the nozzles, the control section updates the map in such a manner that thickness of the imprint material to be molded by using the mold is settled within an allowable range. |
