| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component provided with an electrode structure capable of satisfying both high bonding strength and high electric conductivity, and further to provide a manufacturing method of the electronic component capable of easily manufacturing the electronic component and an electronic apparatus and a movable body being provided with the electronic component and having high reliability.SOLUTION: An electrode layer 193 of a vibrator 1 being an electronic component is constituted by laminating a ground layer 196, an intermediate layer 197 and an upper layer 198 in this order from a front surface of a piezoelectric substrate (substrate) 191. The intermediate layer 197 contains a ground layer main component and an upper layer main component. A top surface of the intermediate layer 197 includes: a first region 1971 mainly having an oxide or a nitride of the ground layer main component; and a second region 1972 mainly having the upper layer main component. Further, a mean grain diameter of crystal grains in the second region 1972 of the intermediate layer 197 is equal to 15 nm or more and equal to 35 nm or less. |
