发明名称 SEMICONDUCTOR ARRANGEMENTS AND METHODS OF MANUFACTURING THE SAME
摘要 Semiconductor arrangements and methods for manufacturing the same. The arrangement may include: a substrate; a back gate formed on the substrate; at least one pair of nanowires disposed on opposite sides of the back gate; and back gate dielectric layers interposed between the back gate and the respective nanowires.
申请公布号 US2015340438(A1) 申请公布日期 2015.11.26
申请号 US201314397463 申请日期 2013.03.11
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES 发明人 ZHU Huilong
分类号 H01L29/06;H01L29/66;H01L29/775;H01L29/78;H01L29/786;H01L29/161;H01L29/16;H01L29/423;H01L29/49 主分类号 H01L29/06
代理机构 代理人
主权项 1. A semiconductor arrangement, comprising: a substrate; a back gate formed on the substrate; at least one pair of nanowires disposed on opposite sides of the back gate; and back gate dielectric layers interposed between the back gate and the respective nanowires.
地址 Beijing CN