MASS TRANSFER SYSTEM

摘要

Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array includes a compliant contact for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads. In an embodiment, the compliant contact is moveable relative to a base substrate of the micro pick up array.

主权项

1. A system comprising:
a transfer head assembly including an operating voltage contact and a clamping voltage contact; and a micro pick up array including a base substrate, a plug formed through the base substrate, and an array of electrostatic transfer heads electrically coupled with the plug; wherein the operating voltage contact is alignable with the plug and the clamping voltage contact is alignable with a backside of the micro pick up array opposite the array of electrostatic transfer heads on a frontside of the micro pick up array.