PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES

摘要

One embodiment relates to a pillar-supported array of micro electron lenses. The micro-lens array includes a base layer on a substrate, the base layer including an array of base electrode pads and an insulating border surrounding the base electrode pads so as to electrically isolate the base electrode pads from each other. The micro-lens array further includes an array of lens holes aligned with the array of base electrode pads and one or more stacked electrode layers having openings aligned with the array of lens holes. The micro-lens array further includes one or more layers of insulating pillars, each layer of insulating pillars supporting a stacked electrode layer. Another embodiment relates to a method of fabricating a pillar-supported array of micro electron lenses. Other embodiments, aspects and features are also disclosed.

主权项

1. A pillar-supported array of micro electron lenses, the pillar-supported array comprising:
a base layer on a substrate, the base layer including an array of base electrode pads; an insulating border surrounding each base electrode pads so as to electrically isolate the base electrode pads from each other; an array of lens holes aligned with the array of base electrode pads; a first stacked electrode layer having a first array of openings aligned with the array of lens holes; and a first layer of insulating pillars which support the first stacked electrode layer above the base layer.