METHODS OF FABRICATING SELF-ALIGNED METAL LAYER STRUCTURE AND OPTIC

摘要

A method of fabricating a self-aligned metal layer structure is disclosed. The method includes: providing a substrate including a conductive layer; forming a pattern in the conductive layer; and electroplating the conductive layer to form thereon an electroplated metal layer such that the pattern is directly transferred in the electroplated metal layer in a self-aligned manner. Methods of fabricating optics are also disclosed. The methods are capable of high accuracy in alignment, and the optics can be used in the production of a lens module.

主权项

1. A method of fabricating a self-aligned metal layer structure, the method comprising the following steps in the sequence set forth:
providing a substrate comprising a conductive layer; forming a pattern in the conductive layer; and electroplating the conductive layer to form thereon an electroplated metal layer such that the pattern is transferred in the electroplated metal layer.