| 发明名称 |
METHOD FOR PRODUCING LAYERED POLISHING PADS |
| 摘要 |
The present invention relates to a method for producing a layered circular polishing pad, comprising steps of forming, in a circular polishing sheet, concentric grooves and an outer circumferential region having a width of ½ or more of a groove pitch of the concentric grooves; and bonding the circular polishing sheet and a supporting layer to each other with a bonding member interposed therebetween to produce a layered polishing sheet. According to the present invention, it is possible to provide a method for producing a layered circular polishing pad in which the polishing layer and the supporting layer are not easily peeled from each other. |
| 申请公布号 |
US2015336234(A1) |
申请公布日期 |
2015.11.26 |
| 申请号 |
US201314652774 |
申请日期 |
2013.10.18 |
| 申请人 |
TOYO TIRE & RUBBER CO., LTD. |
发明人 |
KIMURA Tsuyoshi |
| 分类号 |
B24B37/26;H01L21/306 |
主分类号 |
B24B37/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for producing a layered circular polishing pad, comprising steps of: forming, in a circular polishing sheet, concentric grooves and an outer circumferential region having a width of ½ or more of a groove pitch of the concentric grooves; and bonding the circular polishing sheet and a supporting layer to each other with a bonding member interposed therebetween to produce a layered polishing sheet. |
| 地址 |
Osaka-shi, Osaka JP |
