ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD

摘要

To reduce the amount of a cleaning liquid used in cleaning an object to be cleaned. An ultrasonic cleaning apparatus, includes: an ultrasonic vibrator 11; a liquid storage part 12 provided in contact with the ultrasonic vibrator; an inflow port 12a that makes a cleaning liquid 13 flow in the liquid storage part; and an outflow port 12b that makes the cleaning liquid flow out the liquid storage part, wherein a contact surface 11a on which the ultrasonic vibrator comes into contact with the cleaning liquid is disposed lower than each of the inflow port and the outflow port.

主权项

1. An ultrasonic cleaning apparatus, comprising:
an ultrasonic vibrator; a liquid storage part provided in contact with said ultrasonic vibrator; an inflow port that makes a cleaning liquid flow in said liquid storage part; and an outflow port that makes said cleaning liquid flow out said liquid storage part, wherein a contact surface on which said ultrasonic vibrator comes into contact with said cleaning liquid is disposed lower than each of said inflow port and said outflow port.